| Design and fabrication of a scanning electron microscope using a finite element analysis for electron optical system
Dong-Chul Han
The Journal of Mechanical Science and Technology, vol. 22, no. 9, pp.1734-1746, 2008
Abstract : In this paper, we describe the design and fabrication of a thermionic scanning electron microscope (SEM) and examine
its characteristics analytically. In the design process, the dimensions and capacity of the SEM components, such as
the electron column, lenses, and apertures, were determined using finite element analysis. All components were integrated
systematically during fabrication in order to achieve the maximum performance by adjusting the lens parameters,
high voltage source, and image calibration methods. As a result, a thermionic SEM image with high resolution was
achieved. We discuss the primary considerations required to achieve a high-performance image.
Keyword : Scanning electron microscope; Thermal emission; Electromagnetic lens; Finite element analysis |
