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Control of line width with active nano fountain pen (ANFP) for nano manufacturing
Hun-mo Kim
The Journal of Mechanical Science and Technology, vol. 22, no. 7, pp.1339-1348, 2008
Abstract : In this paper, modeling of ANFP (active nano fountain pen) and a nano size line control system with ANFP based on
fuzzy algorithm is developed. It was found that line width is affected directly with initial mass of meniscus; velocity of
patterning and concentration of ink directly affect line width. The control algorithm using the result of modeling
successfully shows that the speed of patterning is increased and a variation of line width is possible compared with
DPN (dip pen nano lithograph) and FPN (fountain pen nano lithograph). The control of line width system with ANFP
is developed by using fuzzy algorithm. Finally, it is shown that it is possible to develop an effective control of variant
line width with the same speed.
Keyword : ANFP (Active Nano Fountain Pen); Line width; Fuzzy algorithm |
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