Static behavior of nano/micromirrors under the effect of Casimir force, an analytical approach
Hamid Moeenfard, Ali Darvishian and Mohammad Taghi Ahmaidan*
The Journal of Mechanical Science and Technology, vol. 26, no. 2, pp.537-543, 2012
Abstract : In this paper, static behavior of nano/micromirrors under Casimir force is studied. At the first, the equilibrium equation governing the
statical behavior of nano/micromirrors is obtained. Then energy method is employed to investigate statical stability of nano/micromirrors
equilibrium points and a useful equation is suggested for successful and stable design of nano/micromirrors under Casimir force. Then,
equilibrium angle of nano/micromirrors is calculated both numerically and analytically using the homotopy perturbation method (HPM).
It is observed that with increasing the instability number defined in the paper, the rotation angle of the mirror is increased and suddenly,
pull-in occurs. Since analytical results well follow the numerical ones, the presented analytical method in this paper can be used as a fast,
precise and stable design tool in nano/micromirrors under Casimir force.
Keyword : Casimir force; Homotopy perturbation method (HPM); Nano/micromirror; Pull-in; Stability |