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| Fabrication and characterization of PMN-PT single crystal cantilever array for cochlear-like acoustic sensor
S. Hur/S.Q. Lee/H.S. Choi
The Journal of Mechanical Science and Technology, vol. 24, no. 1, pp.181-184, 2010
Abstract : We have successfully fabricated piezoelectric PMN-PT single crystal cantilever array. Each PMN-PT cantilever has a different length
to achieve different resonance frequencies. The width and thickness of PMN-PT cantilever array are 200 μm and 10 μm, respectively.
Resonance frequencies of PMN-PT cantilevers were measured with laser interferometer, and charge sensitivity was measured with
charge-measuring device. PMN-PT cantilever array was installed in a noise-shield case. The array was then exposed to sound pressure
frequency corresponding to resonance frequency to measure its sensitivity. The experimental results show that the PMN-PT cantilever
array has high sensitivity to the sound pressure. This implies that the single crystal PMN-PT cantilever array is a potential candidate for a
cochlear-like acoustic sensor.
Keyword : PMN-PT; Piezoelectric; Cantilever array; Resonance; Acoustic sensor |
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