Chun-Ching Hsiao* and Shih-Yuan Yu
The Journal of Mechanical Science and Technology, vol. 25, no. 11, pp.2835-2842, 2011

Abstract : In the present study, an electrode layout of pyroelectric sensors is developed to improve electric signals. Voltage responsivity is a main target to enhance the performance of pyroelectric sensors. A partially covered, top electrode has been proven to effectively increase the voltage responsivity of pyroelectric sensors. In the experimental results, the proposed electrode layout with an array type in ZnO pyroelectric sensors possessed higher voltage signals, about 3.6 times that of a fully covered type, and about 2 times that of a partially covered type. Moreover, a finite element model is used to explore the temperature variation rate in ZnO pyroelectric sensors for both the fully covered and the partially covered electrodes. In the simulation results, the partially covered electrode can indeed improve the temperature variation rate in the ZnO layer.

Keyword : MEMS; Pyroelectric; Sensor; ZnO