H. J. Kim/J. H. Kim/P. S. Jeon/J. Yoo
The Journal of Mechanical Science and Technology, vol. 23, no. 9, pp.2514-2520, 2009

Abstract : This study considers non-contact methods that obviate the causes of measurement error, such as thermal contact resistance and the unnecessary destruction of samples. Among the methods, the photothermal deflection method has been adopted and developed to measure the thermal conductivities of thin-film materials. To apply the developed method for thin films, bi-layered materials are manufactured by depositing the film on Corning 7740 glass plates. The study also investigates the optimal modulation frequency, as related to the thermal diffusion length of the sample, for measuring thermal conductivities of thin films.. Aluminum, TiO2, and Si3N4 films with micro/nanometer thickness were selected as the objects for measurement; the thermal conductivities of these films were experimentally measured. Samples of thickness ranging from 1 ㎛ to 200 ㎚ were prepared to measure the variations in thermal conductivities with thickness. It was observed that the thermal conductivity in submicroscale films decreased as the thickness was reduced.

Keyword : Photothermal deflection method, Thermal conductivity; Thin film