S. Hur/S.Q. Lee/H.S. Choi
The Journal of Mechanical Science and Technology, vol. 24, no. 1, pp.181-184, 2010

Abstract : We have successfully fabricated piezoelectric PMN-PT single crystal cantilever array. Each PMN-PT cantilever has a different length to achieve different resonance frequencies. The width and thickness of PMN-PT cantilever array are 200 μm and 10 μm, respectively. Resonance frequencies of PMN-PT cantilevers were measured with laser interferometer, and charge sensitivity was measured with charge-measuring device. PMN-PT cantilever array was installed in a noise-shield case. The array was then exposed to sound pressure frequency corresponding to resonance frequency to measure its sensitivity. The experimental results show that the PMN-PT cantilever array has high sensitivity to the sound pressure. This implies that the single crystal PMN-PT cantilever array is a potential candidate for a cochlear-like acoustic sensor.

Keyword : PMN-PT; Piezoelectric; Cantilever array; Resonance; Acoustic sensor